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Journal of Vacuum Science and Technology B

ISSN 2166-2746 · 2166-2754

Publisher: AVS Science and Technology Society

Scopus · Q2WoS · SCIEONOS
2.5
CiteScore 2025
Scopus
Q2
Best quartile
52th percentile
2
Indexed in
major indexes
Web of ScienceClarivate (SCIE/SSCI/AHCI/ESCI)
Collections
SCIE
Categories
Engineering, Electrical & ElectronicNanoscience & NanotechnologyPhysics, Applied
View this source on Web of Science
ABDCAustralian Business Deans Council 2025
Not listed in ABDC.
DOAJDirectory of Open Access Journals (live)
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FT50Financial Times research list
Not listed in FT50.
UT DallasUTD top-100 business research
Not listed in UT Dallas.
ONOS · SubscriptionOne Nation One Subscription — full-text access
This journal is part of the ONOS national subscription — readers at an ONOS-subscribed Indian institution get full-text access to its articles at no cost.
Access depends on your institution’s ONOS participation; the subscribed title list is subject to revision.
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Official sources & links

Journal website ↗ Scopus source ↗ Web of Science ↗

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Index data is curated from public sources (Scopus, Web of Science, ABDC, FT50, UT Dallas, DOAJ). CiteScore and quartiles reflect the latest available Scopus release. Always verify a journal's current status on its official source before submitting.